In the past decades, the micro/nano structures have been widely investigated in biophotonics, sensors and electronics.With the development of the fluidics in various research fields, the structures of arbitrary morphology and controllable size has been desired.There are some conventional techniques to fabricate micro/nano structures.Besides other techniques, femtosecond laser direct writing technique has emerged as a power tool for creating 3D arbitrary micro/nano structures owing to its advantages in maskless, the intrinsic 3D fabrication capability, low-cost and the high penetration ability.The femtosecond laser direct writing technique has been utilized in fabricating the fluidics with different cross sections and arbitrary morphology (Lab Chip, 2010, 10, 1993-1996; Lab Chip, 2010, 10,1057-1060).However, the biocompatible micro/nanofluidics are still of new challenge due to the limited materials.