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The Design and Control of a Dual-Stage Feed Drive System on Ultra-Precision Machine
【机 构】
：
Center for Precision Engineering,Harbin Institute of Technology,Harbin(150001),P.R.China
【出 处】
：
中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th
【发表日期】
：
2008年期
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