A two-dimensional self-consistent fluid model coupled with the full set of Maxwell equations is established to investigate the phase shift effect on transient behaviors of electrodynamics and power de
We present the very first experimental evidence of the so-called collisionless electron bounce-resonance-heating (BRH) in low pressure dual-frequency (DF) capacitively coupled plasmas (CCPs).
Spatial and temporal behaviors of the electron energy distributions (EEDFs) and the plasma parameters were experimentally studied in inductively coupled plasma (ICP) and/or capacitively coupled plasma
The negatively charged nanoparticles are generated for prepare the silicon thin films in the SH4 plasma.It has been recognized that the nanoparticles contamination is a major problem in plasma process
Atmospheric pressure plasmas have been given much attention because of its cost performance and various possibilities for industrial applications.In general,atmospheric plasmas are maintained by the s
To remove the dust particles about 100 cm long within the vacuum chamber,we have developed a large rectangular plasma device with size of 120(L) x 50(W) x 44(H) cm^3.
Dynamic processes of capacitively-coupled hydrogen plasmas generated by fast-rising pulsed high voltages at near-atmospheric pressure have been studied with the use of Particle-in-Cell (PIC) simulatio
Wave-cutoff method is an electron density measurement tool.In this method,an electron density can be acquired from the transmission spectra analysis of plasma.
When a laser is tuned between two excited energy levels of a gas in a DC discharge lamp,the discharge current will experience a temporary disturbance lasting tens or hundreds of microseconds known as