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  5. Studies on the Spatial and Temporal Behaviors of the Electron Energy Distribution and Plasma Paramet

Studies on the Spatial and Temporal Behaviors of the Electron Energy Distribution and Plasma Paramet

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：liuxinjialo
【摘 要】
：
Spatial and temporal behaviors of the electron energy distributions (EEDFs) and the plasma parameters were experimentally studied in inductively coupled plasma (ICP) and/or capacitively coupled plasma
【作 者】
：
Hyo-Chang Lee Chin-Wook Chung 
【机 构】
：
Department of Electrical Engineering, Hanyang University,17 Haengdang-dong,Seongdong-gu, Seoul, 133-
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
inductively coupled plasma capacitively coupled plasma electron energy distribut 
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Spatial and temporal behaviors of the electron energy distributions (EEDFs) and the plasma parameters were experimentally studied in inductively coupled plasma (ICP) and/or capacitively coupled plasma (CCP).
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