Al doped ZnO Film Fabrication through Electrohydrodynamic Atomization

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:ldbeight
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Aluminum doped Zinc Oxide is a transparent conductive oxide and is largely being used as a window layer in CIS/CIGS solar cells.It also finds its applicability in many micro-electronic devices because of its high transmittance and good electrical properties.
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