Direct Printing and Hydrogen Plasma Sintering of Conductive Copper Patterns

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:tienan
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In recent years,direct printing methods such as ink-jet,gravure,offset and screen printing have intensively studied because it is very simple and could reduce the amount of waste of raw materials in comparison with a traditional photolithography process in in which the creation of patterns requires vacuum processing,chemical deposition,and etching.
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