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5. The Properties of Ternary Ti-Al-X-N,(X=Cu,Si,Cr,B) Coating Synthesized by Magnetron Sputtering Proce

The Properties of Ternary Ti-Al-X-N,(X=Cu,Si,Cr,B) Coating Synthesized by Magnetron Sputtering Proce

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：dingdang_2

【作 者】

：

Kyoung Il Moon Duck-Hyeong Jung Cheol Wong Byun Seung Yong Shin 

【机 构】

：

Korea Institute of Industrial Technology,Technology Service Division for SMEs,Incheon Heat & Surface

【出 处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

A1-X-Y-N coatings Single alloying target Magnetron sputtering process Nanocompos 

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