Nonlinear dynamic analysis of capacitive micro-resonator considering non-ideal boundary

来源 :The 5th International Conference on Dynamics, Vibration and | 被引量 : 0次 | 上传用户:dlzhwp
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  There are nonlinear dynamic characteristics in MEMS resonators,which affect its performance.Due to the inevitable errors on the supporting ends in the actual machining of microstructures,both static and dynamic characteristics of the electro-statically actuated clamped-clamped micro-beam are studied considering the non-ideal boundary.
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