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Surface texture technique is believed to have positive effect on the optical,electrical properties of AZO film and improve the photovoltaic efficiency for a-Si/μc-Si and CIGS thin-film solar cells.For a-Si:H andμc- Si:H solar cells,relatively low optical absorption coefficients in the red and near infrared (NIR) spectral range have been observed due to the indirect-transition nature in elemental silicon.