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5. An Efficient Finite Element Method for Grating Profile Reconstruction

An Efficient Finite Element Method for Grating Profile Reconstruction

来源 :第八届工业与应用数学国际大会 | 被引量 : 0次 | 上传用户：robitewx

【摘 要】

：

　　We consider the reconstruction of grating profiles from near-field data.The inverse problem is formulated as an optimization problem with a regularization t

【作 者】

：

ZhangRuming;SunJiguang; 

【机 构】

：

Michigan Technological Univ.

【出 处】

：

第八届工业与应用数学国际大会

【发表日期】

：

2015年期

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论文部分内容阅读

　　We consider the reconstruction of grating profiles from near-field data.The inverse problem is formulated as an optimization problem with a regularization term.We employ a quasi-Newton method to solve it,for which we devise an efficient finite element method.

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