CoFeB薄膜面内各向异性的调控以及高频特性的研究

来源 :中国物理学会2015年秋季会议 | 被引量 : 0次 | 上传用户:sinner888
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  拥有高的磁导率和共振频率的磁性材料在电子器件当中有很高的需求,如何提高磁性样品的磁导率和共振频率成为一个研究热点.根据Kittel公式1,共振频率依赖于样品的各向异性和饱和磁化强度,提高样品的各向异性就可能提高样品的共振频率.我们通过斜溅射的方法制备CoFeB样品,研究了CoFeB薄膜样品的静态和高频磁学性质.静态和动态的结果表明样品具有很好的面内单轴各向异性,随着斜溅射角度的增加,样品的面内各向异性不断的增加,共振频率也在不断的增加,最终我们实现了样品共振频率从2.55到9.71 GHz 的调节,最后我们用self-shadow effect解释了这种变化结果2.
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