【摘 要】
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Batch load Layout Schematics of main groupsSchematics of main groupsGas System Up to 7 gas lines available:· Hydrogen· Argon· Silane· Liquid silicon precurs
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Batch load Layout Schematics of main groupsSchematics of main groupsGas System Up to 7 gas lines available:· Hydrogen· Argon· Silane· Liquid silicon precursor such as TCS, TET, or MTCS.· Propane or Ethylene· Nitrogen· Additional doping line· Liquid or gas TMA
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