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5. On Mass Spectrum Interpretation: The Surface Origin of the Mass Spectroscopy Signal

On Mass Spectrum Interpretation: The Surface Origin of the Mass Spectroscopy Signal

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：Kimyueyue

【摘 要】

：

Mass spectroscopy is a very important technique in diagnosing the status of plasma discharges.However,the signal interpretation from the mass spectra is usually not so direct that limits its applicati

【作 者】

：

Jiang-Tao Li Zhen-bin Wang Da-Wei Hu Yi-Kang Pu 

【机 构】

：

Department of Engineering Physics, Tsinghua University, Beijing 100084, China

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

mass spectroscopy surface origin electron stimulated desorption ionizer 

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Mass spectroscopy is a very important technique in diagnosing the status of plasma discharges.However,the signal interpretation from the mass spectra is usually not so direct that limits its application.

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