Analysis of Electromecha nical Coupling Cha racteristics for Force-ba lanced Vacuum Microelectronic

来源 :中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th | 被引量 : 0次 | 上传用户：linjianvhai

【作者】

：

Yin-chuan Yang Zh i-yu Wen Xue-feng He Dong-ling Li Zheng-guo Shang

【机构】

：

National Defense Key Subject Laboratories for Novel Micro/Nano Device and System Technology,Chongqin

【出处】

：

中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th

【发表日期】

：

2008年12期

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