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通过对新型锯齿型和传统扩张/收缩型两种微流道内部流场数值分析结果进行比较,得出微流道内流动状态随雷诺数的变化情况以及漩涡产生原因;锯齿型微流道由于侧面齿形角的存在,流动过程中较传统扩张/收缩型微流道易产生漩涡,正是由于漩涡的产生使流道压力损失降低,因而新型锯齿型微流道微泵性能优于传统扩张/收缩微流道微泵.最后采用先进的硅深反应刻蚀技术(DRIE)在硅片上加工制作出两种微流道及泵腔结构,并采用硅-玻璃阳极键合以及玻璃-聚二甲基硅氧烷(PDMS)紫外线键合的方法封装出三明治结构式微泵.通过对两种微泵分别在对称和电压偏置正弦波驱动下进行性能测试,得出电压正向偏置时微泵性能仅次于对称波形驱动下微泵性能,而电压负向偏置时最差.在对称波形驱动下,新型锯齿型微流道微泵最大流量(MFR)和最大压力头(MPH)值分别为扩张/收缩微流道微泵的1.4倍和1.9倍,因此采用新型锯齿型微流道结构将使微泵性能大大提高.
By comparing the results of numerical analysis of the flow field inside the two new micro-channel with zigzag type and traditional expansion / contraction type, we can get the change of flow state with the Reynolds number and the cause of the vortex in the micro-channel. As for the serrated micro-channel, The existence of toothed angle, the flow of the traditional expansion / contraction of the micro-flow vortex easy to produce vortex, it is due to the generation of vortex flow channel pressure loss reduction, and thus the new serrated micro-channel micro-pump performance is superior to the traditional expansion / Shrink microfluidic micropumps.Finally, two kinds of microchannels and pump cavities were fabricated on silicon wafer by using advanced deep reactive silicon etching (DRIE), and silicon-glass anodic bonding and glass-poly Methyl siloxane (PDMS) UV bonding method sandwich sandwich structure type micro-pump.Through the two kinds of micro-pump respectively in the symmetrical and voltage-biased sine wave drive performance test, the voltage bias is obtained when the micro-bias The performance of the pump is second only to that of the symmetrical waveform driven micropump but the voltage is negative biased the worst. Under the symmetrical waveform drive, the new serrated micro-channel micro-pump maximum flow (MFR) and the maximum pressure head (MPH) Respectively, expansion / contraction Micro-channel micro-pump 1.4 times and 1.9 times, so the new serrated micro-channel structure will greatly improve the performance of micro-pump.