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目前,用户采用单只标准漏孔对氦质谱检漏仪进行校准,由于受检漏仪线性范围的影响限制,不能对其全量程范围进行校准。为了满足对氦质谱检漏仪全量程范围内的现场校准,将一系列不同量级漏率的薄膜渗氦型标准漏孔分别接入氦质谱检漏仪,得到一组标准漏孔检漏仪示值,通过对标准漏孔漏率值与检漏仪示值的关系曲线进行数学拟合,得到氦质谱检漏仪全量程测量范围示值与漏率值之间的拟合公式。其校准过程简单,能够提高氦质谱检漏质量。
Currently, the user calibrates a helium mass spectrometer leak detector using a single standard leak, which can not be calibrated over its full-scale range due to the limited linear range of the leak detector. In order to meet the on-the-spot calibration in the full range of helium mass spectrometer, a series of standard helium leaks of different magnitudes are respectively connected to helium mass spectrometer leak detector to obtain a set of standard leak detector Through the mathematical fitting of the relationship between the standard leakage rate and the leak detector, the fitting formula between the indication and the leakage rate of the full range measurement range of the helium mass spectrometer leak detector is obtained. The calibration process is simple, can improve the quality of helium mass spectrometry.