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本文论述了晶体生长控制中使用的称重法的基本原理。原理说明晶体生长中最成功的控制技术是拾取弯月面形状变化的信号来加以调节,称重法就是这种技术之一。文章给出了电子秤的机械稳定性和高稳定度前置放大器的研究结果。设计出用于提拉法生长晶体中从放肩到等径生长的直径控制的闭环系统。给出了该系统的运行结果。
This article discusses the basic principles of weighing methods used in crystal growth control. Principle Description The most successful control of crystal growth is to pick up the signal of the meniscus shape to be adjusted, and the weighing method is one of these techniques. The article gives the electronic scale mechanical stability and high stability of the preamplifier results. A diameter-controlled closed-loop system was designed for use in the Czochralski growth crystal from free-standing to equiaxial growth. The result of this system is given.