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Perkin-Elmer公司宣布:他们已试制出二种先进的掩模投影光刻机——Micralig n500型(每小时能处理5英寸的硅片100枚)和Micralign300型(每小时能处理4英寸的硅片60枚左右)。据该公司说,这二种设备的套刻精度均为±0.5um。Micralign500型的分辨率为0.9～1.25μm,这主要随工作波长而定(在紫外线谱带内)。基本价格为68万美元。Micraligu300型的分辨率为1.125～1.25μm,也随工作波长而定。基本价格为29万5千美元。Perkin-Elmer公司声称:Micralign300型的生产率
Perkin-Elmer Corporation announced that they have prototyped two advanced mask projection lithography machines - the Micralig n500 (capable of handling 100-inch wafers per hour) and the Micralign 300 (capable of handling 4-inch wafers per hour 60 pieces or so). According to the company, the precision of these two kinds of devices are ± 0.5um. The Micralign 500 has a resolution of 0.9 to 1.25 μm, which depends mainly on the operating wavelength (within the UV range). The basic price is 680,000 US dollars. Micraligu300 resolution of 1.125 ~ 1.25μm, but also with the working wavelength. The basic price is 295,000 U.S. dollars. Perkin-Elmer claims: Micralign300 productivity