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本文根据悬臂梁式压电双晶片的动态导纳矩阵 ,设计了一种器件参数动态测试模型 ,用于测量压电双晶片的几个主要参数 :压电常数d31 、机电耦合系数k31 、介电常数εT33、弹性顺度常数sE1 1 和等效电容等。文中详细叙述了测试模型的建立和测试步骤 ,并提供了一种实际试样的测试结果。理论与实验表明 ,这种新的动态测试方法是精确、可行的
Based on the dynamic admittance matrix of cantilever piezoelectric bimorphs, a dynamic test model of device parameters is designed to measure several main parameters of piezoelectric bimorph: piezoelectric constant d31, electromechanical coupling coefficient k31, dielectric Constant εT33, elastic compliance constant sE1 1 and equivalent capacitance. The article describes in detail the establishment of the test model and test steps, and provides a real test results of the sample. Theory and experiment show that this new dynamic testing method is accurate and feasible