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应用两种方法对三个高精度平面进行了测试。第一种方法是Fritz的三面互检法,它利用Zernike多项式的特性拟合三个面四次组合测量得到的干涉图,然后求出三个面的Zernike多项式系数,从而得到三个面的面形偏差。第二种方法是奇偶函数法,根据函数的奇偶性,把平面的面形函数分解为四类:偶奇、奇偶、偶偶和奇奇函数,分别求出各分量,从而得到三个面的三维面形偏差。对两种方法都编制了理论模拟和实测程序,并进行了实验,实现了无参考面的高精度平面面形测试。
Two methods were used to test three high-precision planes. The first method is Fritz’s three-sided mutual detection method, which takes advantage of the properties of Zernike polynomials to fit the interferograms obtained from the four combinations of three planes and then obtains the Zernike polynomial coefficients of the three planes to obtain the three planes Shape deviation. The second method is the odd and even function method, according to the function of the parity, the planar surface shape function is decomposed into four categories: even, odd, even, even and odd functions, respectively, to find the components, resulting in three-plane three-dimensional surface Shape deviation. The theoretical simulation and the actual measurement program have been prepared for both methods, and experiments have been carried out to realize the high-precision planar surface test without reference surface.