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在室温下,应用对靶磁控溅射法制备了多层C/[Co5nm/Cxnm]4/C颗粒膜.C靶和Co靶分别采用了射频溅射和直流对靶溅射模式,随后进行了原位退火.用振动样品磁强计(VSM)和扫描探针显微镜(SPM)系统研究了插层C层的厚度对多层颗粒膜的微结构和磁特性的影响.X射线衍射(XRD)图样显示出样品具有六角密堆积结构.振动样品磁强计测量表明磁矩很好地排列在膜面内,在插层C层的厚度为12nm时矫顽力达到最大值,剩磁比接近于1.
At room temperature, a multi-layer C / [Co5nm / Cxnm] 4 / C granular film was prepared by magnetron sputtering on target.The RF sputtering and DC sputtering were applied to the C and Co targets, respectively, followed by In situ annealing was used to investigate the effect of intercalation layer C thickness on the microstructure and magnetic properties of multilayered granular films by vibrating sample magnetometer (VSM) and scanning probe microscopy (SPM). X-ray diffraction (XRD ) Pattern shows the sample has hexagonal close-packed structure.Vibrational sample magnetometer measurements show that the magnetic moment is well arranged in the film plane, the thickness of the intercalation C layer coercivity reaches a maximum of 12nm, the remanence ratio close At 1