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介绍了用于加工微结构的微细电解加工技术,超短脉冲电源的应用很大程度上提高了微细电解加工的定域性。首先,建立了一整套用于微细电解加工的加工系统;然后,为优化加工结果,分组实验并研究了一些重要加工参数对加工过程的影响,着重分析了脉冲宽度对加工形状精度的影响和电极工作端形状对已加工表面质量的影响;最后,在优化后的参数条件下,成功加工出了一个形状精度高、已加工表面质量好的复杂结构。
The micro-electrolysis processing technology for machining microstructure is introduced. The application of ultra-short pulse power supply greatly improves the localization of micro-electrolysis processing. First of all, a complete set of processing system for micro-electrolysis processing was established. Then, in order to optimize the processing results, the effects of some important processing parameters on the processing were grouped experimentally and the effects of pulse width on the processing precision were analyzed. The shape of working end affects the quality of machined surface. Finally, under the optimized parameters, a complex structure with high precision of shape and good surface quality has been successfully machined.