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借助于VC++编程从理论上模拟分析了膜厚监控误差以及监控片不均匀性对光学膜厚监控的影响。结果表明,膜厚监控误差和监控片的不均匀性都对监控曲线有影响;随着膜层层数的增加,监控片不均匀性逐渐增大。实验制备了多层规整薄膜并对其监控曲线进行了分析,分析表明考虑到膜厚监控误差和监控片不均匀性后计算的光学监控曲线和镀膜过程实测光学监控曲线吻合较好。这说明膜厚监控误差和监控片不均匀性是引起监控曲线与理论值偏离的重要因素。介绍了如何计算考虑膜厚监控误差和监控片不均匀性后的理论监控曲线。这将对膜厚自动监控,尤其是对非规整膜系的自动监控具有重要的指导意义。
By means of VC ++ programming, the influence of monitoring error of film thickness and monitoring film inhomogeneity on the optical film thickness monitoring was theoretically analyzed and simulated. The results show that both the monitoring error of the film thickness and the inhomogeneity of the monitoring film have an influence on the monitoring curve. As the number of layers increases, the inhomogeneity of the monitoring film gradually increases. The multi-layer structured film was prepared experimentally and its monitoring curve was analyzed. The analysis showed that the calculated optical monitoring curve was in good agreement with the measured optical monitoring curve after taking into account the monitoring error of the film thickness and the inhomogeneity of the monitoring film. This shows that monitoring error and monitoring film thickness is not uniform monitoring curve caused by deviation from the theoretical value of an important factor. How to calculate the theoretical monitoring curve considering the monitoring error of the film thickness and the inhomogeneity of the monitoring piece is introduced. This will automatically monitor the film thickness, especially for the automatic monitoring of non-regular film system has an important guiding significance.