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对飞秒激光诱导银纳米布线的加工精度进行研究,并将其应用于微纳器件的加工领域。对飞秒激光与银离子前驱体溶液的相互作用进行了实验,通过对飞秒激光功率、曝光时间、前驱体溶液中表面活性剂种类以及浓度的调控,利用扫描电子显微镜对布线结构进行表征,得到140nm宽的银纳米线。利用飞秒激光制备出一组银微纳图案和微型催化反应器。该研究为银微纳结构图案制备以及复杂衬底上金属功能器件集成提供了新的技术。
Femtosecond laser-induced silver nano-wire processing precision research, and its application in the field of micro-nano devices processing. The interaction between femtosecond laser and silver ion precursor solution was studied. The structure of the wiring was characterized by scanning electron microscopy (SEM) through the control of femtosecond laser power, exposure time, surfactant type and concentration in the precursor solution, A 140 nm wide silver nanowire was obtained. A set of silver micro-nano-patterns and micro-catalytic reactors were fabricated using femtosecond laser. The research provides a new technology for the fabrication of silver micro-nano structure patterns and the integration of metal functional devices on complex substrates.