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本文讨论了容积真空泵工作中解决水蒸气在泵内凝结的方法,如热泵技术、滑阀水环泵组合结构和气镇原理等。提出了相对于国际标准更完整、更确切的水蒸气容限和水蒸气抽出量的定义,论述了水蒸气容限测量方法的研究和进展,水蒸气容限的测量原理、测量程序以及测量评估。
This article discusses the volume of vacuum pump work to solve the condensation of water vapor in the pump methods, such as heat pump technology, valve ring pump ring structure and gas town principle. A more complete and accurate definition of water vapor tolerance and water vapor extraction is put forward compared with international standards. The research and development of water vapor tolerance measurement methods, the measuring principle of water vapor tolerance, measurement procedures and measurement and evaluation .