研究了片状压电陶瓷驱动器在柔性手臂中的应用 ,推导了基于压电陶瓷驱动器的柔性臂静力学方程 ,建立了描述驱动器迟滞特性的 Preisach模型 ,提出了一种基于 Preisach前馈环的 PID控制方法对柔性臂进行振动主动控制和轨迹控制。试验表明 ,此方法可以有效地克服片状压电陶瓷驱动器的迟滞特性 ,消除柔性臂运动产生的振动 ,实现柔性臂的高精度轨迹控制 The application of chip piezoelectric actuator in flexible arm is studied. The static equation of flexible arm based on piezoelectric ceramic actuator is deduced. Preisach model describing the hysteresis of the actuator is established. A PID based on Preisach feedforward loop Control Method Vibration Active Control and Trajectory Control of Flexible Arm. Experiments show that this method can effectively overcome the hysteresis characteristics of the piezoelectric chip actuator, eliminate the vibration generated by the flexible arm movement, and realize the high precision trajectory control of the flexible arm