设计并制作了一种能直接与通信用标准单模光纤阵列相耦合的 1× 16多模干涉型光功分器。其输入、输出单模波导采用离散谱折射率法优化设计 ,获得了脊宽为 3μm、脊高为 2 .9μm和理论传输损耗约为 0 .0 2 8dB cm的单模脊形光波导。分析表明 ,这种深刻蚀多模干涉型光功分器具有较大的制作容差性、较宽的工作带宽以及几乎可忽略的极化依赖性。测试结果表明 ,器件实现了 1× 16光功分器功能 A 1 × 16 multimode interference optical power splitter which can be directly coupled with the standard single-mode optical fiber array for communication is designed and fabricated. The input and output single-mode waveguides were optimized by discrete spectral index method. The single-mode ridge waveguide with ridge width of 3μm, ridge height of 2.9μm and theoretical transmission loss of 0.0282 cm was obtained. The analysis shows that this kind of deep etching multimode interference optical splitter has larger fabrication tolerance, wider working bandwidth and almost negligible polarization dependence. The test results show that the device achieved 1 × 16 optical splitter function