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针对高精度温度测量需求,设计了一种新切型石英音叉谐振式温度敏感元件,通过悬臂梁弯曲振动微分方程理论计算和有限元预应力大形变模态仿真,分析了敏感元件的温频特性.采用石英MEMS加工工艺,研制出石英谐振式温度敏感元件,封装成测试样机,搭建温度测试平台并对原理样机进行性能测试.与理论计算和有限元仿真结果进行比对,可知理论计算和有限元仿真能准确反映出敏感元件的温频特性.在-40~60℃的温度范围内,样机的测试结果为:标称频率为67 377.656 Hz,灵敏度为-0.71 Hz/℃,一阶频率-温度系数为-1.225 1×10~(-5)℃~(-1),重复性为0.022%,迟滞为0.054%.
Aiming at the requirement of high-precision temperature measurement, a new type of quartz tuning fork resonant temperature-sensitive element was designed. Through the theoretical calculation of cantilever beam vibration differential equation and the finite element prestress large deformation modal simulation, the temperature-frequency characteristics of the sensitive element Quartz MEMS processing technology was used to fabricate a quartz resonance temperature sensitive device, which was packaged into a test prototype, a temperature test platform was built and the performance of the prototype was tested.Compared with the theoretical and finite element simulation results, we can see that the theoretical calculation and finite The meta-simulation can accurately reflect the temperature-frequency characteristics of sensitive components.The test results of the prototype are as follows: the nominal frequency is 67 377.656 Hz, the sensitivity is -0.71 Hz / ℃, the first order frequency- The temperature coefficient is -1.225 1 × 10 -5 ℃ -1, the repeatability is 0.022% and the hysteresis is 0.054%.