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包头稀土研究院与包头天骄清美稀土抛光粉有限公司合作开发的氧化铈新型半导体抛光液研究项目,在双方共同努力下,近日签订了科研项目合作协议书。本课题以半导体芯片制程中的氧化硅绝缘层为抛光对象,开展CeO2基稀土抛光液的研究工作,主要研究目标是能够制备出满足集成电路芯片?
Baotou Rare Earth Research Institute and Baotou Tianjme Qingmei Rare Earth Polishing Co., Ltd. developed a new type of cerium oxide semiconductor polishing liquid research project, with the joint efforts of both parties, recently signed a cooperation agreement of scientific research projects. The subject of the semiconductor chip process of silicon oxide insulation for the polished object to carry out CeO2 rare earth polishing liquid research work, the main research goal is to be able to meet the requirements of integrated circuit chips?