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首先介绍了磁微执行器的驱动原理及其在发展中遇到的问题 ;然后具体分析了几种代表性的磁微执行器 ;最后介绍了它们的几个典型应用。
Firstly, the driving principle of magnetic micro-actuator and its problems encountered in the development are introduced. Then, several representative micro-actuators are analyzed in detail. Finally, some typical applications of them are introduced.