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采用选择区域外延生长技术和对接再生长技术,设计并制作了10信道分布反馈激光器阵列与多模干涉耦合器的单片集成器件。器件中采用了新的技术,集成了钛薄膜热电阻用于波长调谐。集成器件烧结到热沉上后,在25℃温控条件下测试,激光器阵列的平均信道间隔为1.29nm,阈值电流为22~30mA;当激光器注入电流为200mA,各信道的平均出光功率为0.5mW。集成热电阻的调谐效率约为5nm/W,通过施加合适的热电流调谐,该集成器件可以覆盖34路信道间隔为50GHz的波长范围。集成器件可单波长选择输出,也可10信道同时运作合波输出。
The selective area epitaxial growth technique and the docking re-growth technique were used to design and fabricate a monolithic integrated device with 10-channel distributed feedback laser array and multi-mode interference coupler. The device incorporates new technology that integrates a titanium thin film thermal resistor for wavelength tuning. The integrated device was sintered to a heat sink and tested under the temperature control condition of 25 ° C. The average channel spacing of the laser array was 1.29 nm and the threshold current was 22-30 mA. When the laser injection current was 200 mA, the average output power of each channel was 0.5 mW. The tuning efficiency of the integrated RTD is about 5nm / W, and the integrated device can cover 34 channels of 50GHz wavelength range by applying proper thermal current tuning. Integrated devices can choose a single wavelength output, but also 10 channels at the same time operation of the composite output.