原子力显微镜 (AFM)的微探针系统是典型的微机械构件 ,它在接触扫描过程处于耦合变形状态 .采用数值模拟方法探究恒力模式下探针耦合变形对微观扫描力信号、微观形貌信号的影响 .研究表明 ,AFM的恒力模式扫描中 ,法向扫描力并不是恒定大小 ,与轴向扫描力存在耦合作用 ,在粗糙峰峰值增加阶段 ,二力均增加 ;在粗糙峰峰值减小阶段 ,二力均减小 ;该耦合作用随形貌坡度、针尖长度等增加而加强 .微观形貌的测试信号和横向扫描侧向力信号受探针耦合变形影响较小 ,但侧向力与形貌斜率密切相关 ,且其极值点与形貌极值点存在位置偏差 ,这些结果均与原子力显微镜的摩擦信号测试结果一致 Atomic Force Microscopy (AFM) microprobe system is a typical micro-mechanical component, which is in the process of contact scanning in a coupled deformation state.Using numerical simulation methods to probe the coupling force of micro-scanning force signal, micro-topography signal The results show that the normal scanning force is not constant in the constant-force scanning of AFM, which has a coupling effect with the axial scanning force, and the two forces increase in the increasing period of the asperity peak. When the asperity peak decreases The coupling force decreases with the increase of topography, tip length, etc. The test signals of micro-topography and transverse scan lateral force signals are less affected by the probe-coupling deformation, but the lateral force and Morphology slope is closely related, and the extremum point and the shape of the extreme points exist position deviation, these results are consistent with the atomic force microscope friction signal test results