近10年来,微电子产业获得巨大发展,而且,今后会有更大发展前景——在跨世纪时代将成为支持新产业的中流砥柱。要维持微电子产业的发展,必须保证半导体材料中性能优异的金属材料的长期而稳定供给。20年来.硅在半导体电子学材料中占主导地位,而且正形成“锗——硅技术”浪潮。因此,了解该项技术的发展动向及其 In the past 10 years, the microelectronics industry has made tremendous development. Moreover, there will be more prospects for development in the future - in the inter-century era, it will become the mainstay for supporting new industries. To maintain the development of the microelectronics industry, the long-term and stable supply of metal materials with excellent properties in semiconductor materials must be guaranteed. Over the past 20 years, silicon has dominated semiconductor electronics materials and is forming a wave of “germanium-silicon technology.” Therefore, understand the development trend of the technology and its