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结合辉光渗氮试验结果,对直流辉光等离子体材料处理中的边缘效应进行了研究,根据相关鞘层理论,对工件边角处及其附近的鞘层厚度S、电场强度E及离子密度n进行了定性分析。结果表明:在边缘效应范围d内,当远离边角时,S将变大、E及n变小。主等离子体密度n0的减少将使边缘效应的影响范围d变大,因此降低工作气压p及电流I可减弱边缘效应。采用改进措施渗氮后,工件边缘效应得到抑制,且渗氮效果较好。
Combined with the result of glow-nitriding test, the edge effect in DC glow plasma material processing was studied. According to the related sheath theory, the thickness S, the electric field intensity E and the ion density n conducted a qualitative analysis. The results show that in the edge effect range d, when away from the corner, S will become larger, E and n become smaller. The reduction of the main plasma density n0 will increase the influence range d of the edge effect, so reducing the working pressure p and the current I may weaken the edge effect. With the improvement of nitriding, the edge effect of the workpiece is suppressed and the nitriding effect is better.