在经典的矩形悬臂梁结构基础上进行改进,设计了一种新型的基板与压电膜镂空的微悬臂梁能量采集器。在悬臂梁基板与压电膜上添加镂空,分析其结构尺寸(即镂空的长度、宽度、厚度以及数量)与压电振子固有频率和开路输出电压之间的关系,并通过调节其结构尺寸,使压电能量采集器具有更低的振动频率与更高的开路输出电压。实验结果表明,在镂空长度为200μm,宽度为165μm,数量为12时,该结构振子的固有频率可达到399.7Hz,开路输出电压可达0.271V。 Based on the classic rectangular cantilever structure, an improved micro-cantilever energy collector with a substrate and a piezoelectric membrane is designed. In the cantilever substrate and the piezoelectric film added hollow, analysis of the structure of the size (ie hollow length, width, thickness and number) and the piezoelectric oscillator natural frequency and the relationship between the open-circuit output voltage, and by adjusting its structure size, The piezoelectric energy harvester has a lower vibration frequency and a higher open circuit output voltage. The experimental results show that the inherent frequency of the structure oscillator can reach 399.7Hz and the open circuit output voltage can reach 0.271V when the hollow length is 200μm, the width is 165μm and the number is 12.