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ZnO薄膜是一种极为重要的多功能电子材料,已广泛地应用于体声波(BAW)延迟线、声表面波(SAW)器件、声光器件,以及气敏、力敏、压敏等传感器件中.传统的ZnO薄膜制备技术主要有射频磁控溅射,离子束蒸发,化学气相淀积等几种,近年来,Sol-Gel技术得到了很大的发展,已成功地制备出高取向的PbTiO_3薄膜.高取向和外延的K(Ta,Nb)O_3薄膜和(Sr,Ba)Nb_2O_6薄膜等,利用该工艺制备高质量的薄膜,有着极大的发展潜力.本文报道了采用Sol-Gel法在石英玻璃衬底上制备高c轴取向ZnO薄膜
ZnO thin film is an extremely important multi-functional electronic material and has been widely used in bulk acoustic wave (BAW) delay line, surface acoustic wave (SAW) devices, acousto-optical devices and gas sensing devices In recent years, the traditional preparation techniques of ZnO thin films mainly include RF magnetron sputtering, ion beam evaporation, chemical vapor deposition, etc. In recent years, the Sol-Gel technology has been greatly developed, and highly oriented PbTiO_3 thin film.Highly oriented and extended K (Ta, Nb) O_3 thin films and (Sr, Ba) Nb_2O_6 thin films have great potential for the development of high quality thin films.This paper reports the use of Sol-Gel method High c-axis oriented ZnO films were prepared on quartz glass substrates