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No.1ASubdivisionMethodwithHighResolutionandHighResponseSpeedinGrating BasedNanometrology YUWen xin ,HUXiao tang,ZOUZi qiang(1 )…………………
No. 1 Subdivision Method and High Resolution and High Response Powers in Grating Based Nanotechnology Control Wen, HU Xiao tang, ZOU Zi qiang (1)