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OHS运输系统是超大规模集成电路(VLSI)制造工业环境中洁净工艺系统中的重要组成部分,但是由于工业厂房的结构复杂且分布着较为密集的精密设备,OHS运输过程产生的微振动会对生产造成危害,因此需要建立合理有效的微振动控制分析方法辅助工程设计。文章基于该类工程微振动传递线性特征,利用工程实测数据,建立了振动能量封闭体简化分析模型,提出基于传递函数相似性的OHS系统微振动影响控制分析方法,并利用实际工程对该方法进行了应用说明。分析结果表明:该方法实施简单且符合现阶段工程应用需求,为OHS系统振动影响提供了合理可靠的分析手段。
OHS transport systems are an important part of clean process systems in VLSI manufacturing industrial environments. However, due to the complex structure and dense distribution of industrial plants, the micro-vibrations generated by the OHS transport process can affect production It is necessary to establish a reasonable and effective micro vibration control analysis method to assist the engineering design. Based on the linear characteristics of micro-vibration transmission in this kind of project, a simplified analysis model of vibration energy enclosure was established based on the measured data of the project. A control analysis method of micro-vibration of OHS system based on the similarity of transfer function was proposed. The method was carried out by practical engineering Application Notes The analysis results show that the method is simple to implement and meets the requirements of current engineering application, and provides a reasonable and reliable analytical method for the vibration impact of OHS system.