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同步辐射红外光源具有宽光谱范围、高准直性、高亮度等特点。相比于传统的红外热光源,同步辐射红外光源的尺寸非常小,空间分辨率可达到衍射极限。为了得到准确的空间分辨率信息,对上海光源BL01B1红外谱学显微光束线站的空间分辨率进行了测试。使用刀片法和鉴别率板对上海光源BL01B1红外谱学显微光束线站水平和垂直方向的空间分辨率进行了详细测量,两种测试方法的结果都表明在所测的中红外波段,同步辐射红外谱学显微技术的空间分辨率达到衍射极限,与理论值十分符合。
Synchrotron radiation infrared light source with a wide spectral range, high collimation, high brightness and so on. Compared with the traditional infrared heat light source, the size of the synchrotron radiation infrared light source is very small, and the spatial resolution can reach the diffraction limit. In order to obtain accurate spatial resolution information, the spatial resolution of Shanghai Light Source BL01B1 infrared spectrometer microscope beam station was tested. The blade method and discriminating rate plate were used to measure the horizontal and vertical spatial resolution of Shanghai Light Source BL01B1 infrared spectroscopy microscope beam station. The results of the two test methods show that in the measured mid-infrared band, synchrotron radiation The spatial resolution of infrared spectroscopy microscopy reaches the diffraction limit, in good agreement with the theoretical value.