A novel method capable of sufficient mixing of titanium powder and methane of carbon source was developed in the synthesis of titanium carbide by induction plasma reactive spray. X-ray diffraction analysis, optical microscopy, scanning electron microscopy, and microhardness test were used to characterize the spray-formed deposit.The experimental results show that both primary carburization of the titanium particles inside the plasma flame and secondary carburization of the growing deposit on high temperature substrate contribute to the forming of titanium carbide. The transitional phase of TiC1-x has the same crystal structure as TiC, but has a slightly low lattice constant. The deposit consists of fine grain structure and large grain structure. The fine grain structure, harder than large grain structure, shows grain boundary fracture.