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光学镜面的变形包括刚体位移和面形误差(表面畸变),分析刚体位移和面形误差对于评价光机系统的环境适应性、空间位置稳定性和成像质量具有重要作用。根据坐标转换法去除镜面变形中的刚体位移,论述了曲面拟合、法线方向和光轴方向三种面形误差统计方法的原理并进行了深入比较,针对不同重力及温度工况计算了镜面面形误差的均方根(RMS)值及峰谷(PV)值。引入镜面弥散斑RMS半径并将其作为面形误差大小的光学评价标准,通过三次插值算法生成栅格矢高面,在ZEMAX软件中建立了高精度的镜面面形误差光学模型,最后采用面形误差的RMS值及PV值与弥散斑RMS半径之间的线性关系考查了三种面形误差统计方法的光学性能。研究结果表明:曲面拟合法统计的面形误差信息不完整,适用于镜面面形方程参数不发生明显改变的工况。法线方向和光轴方向两种统计方法统计的面形误差信息完整,可以全面地衡量光机系统的成像质量。
Optical mirror deformation includes rigid body displacement and surface shape error (surface distortion). Analysis of rigid body displacement and surface shape error plays an important role in evaluating the environmental adaptability, spatial position stability and image quality of the optical system. According to the method of coordinate transformation, the displacement of rigid body in the mirror deformation is removed. The principle of the statistical methods of surface fitting, normal direction and optical axis direction is discussed and compared in depth. According to the different gravity and temperature conditions, The root mean square (RMS) value and the valley (PV) value of the shape error. The RMS radius of the speckle speckle is introduced and used as the optical evaluation criterion of the shape error. The third generation interpolation algorithm is used to generate the height vector of the grid. A highly accurate optical model of the specular error is established in the ZEMAX software. Finally, The linear relationship between the RMS value and PV value and diffusion spot RMS radius was investigated. The results show that the information of surface error of surface fitting method is incomplete, and it is suitable for the condition that the parameter of mirror surface equation does not change obviously. The information of face shape error, which is obtained from the statistics of normal direction and optical axis direction, is complete, which can comprehensively measure the imaging quality of optical system.