论文部分内容阅读
介绍了用于天光一号高功率氟化氪 (KrF)准分子激光系统中的电子束双向激励主放大器稳定运行中必须解决的一些重要技术问题 :水介质脉冲传输线中的绝缘支撑击穿问题 ;大面积电子束二极管阳极膜的安装 ;与压力膜接触处Hibachi筋的形状 ;二极管后脉冲的形成及其对阳极膜和阴极发射体造成的损害等问题。还着重描述了主开关导通时刻对二极管后脉冲的影响及最佳导通时刻的确定
Some important technical problems that must be solved in the steady operation of the electron beam bidirectional excitation main amplifier used in the high power krypton fluoride (KrF) excimer laser system of Tianguang 1 are introduced: the insulation support breakdown in the aqueous medium pulse transmission line; The installation of a large area electron beam diode anode film; the shape of the Hibachi bar in contact with the pressure film; the formation of a post-diode pulse and its damage to the anode film and the cathode emitter. It also emphatically describes the main switch on-time after the diode pulse impact and determine the best time to turn