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采用真空电弧离子镀技术在1Cr17Ni2不锈钢基体表面沉积Ti/TiN/Zr/ZrN多层膜,并对膜的形貌、相结构、结合力以及极化曲线和交流阻抗等电化学性能进行分析和测试。结果表明:制备的Ti/TiN/Zr/ZrN膜界面清晰、结构致密、晶粒细小,膜层厚度约为2~3μm,膜层的主要物相为TiN和ZrN两相,以及少量的金属Ti和Zr;膜层与基体结合良好,结合力大于70 N,显微硬度(HV_(0.025))高达29 000 MPa,Ti/TiN/Zr/ZrN多层膜与1Cr17Ni2基材相比,具有更高的极化电位和极化电阻,更低的腐蚀电流密度,更大容抗弧。
Ti / TiN / Zr / ZrN multilayers were deposited on 1Cr17Ni2 stainless steel substrate by vacuum arc ion plating technique. The morphology, phase structure, bonding force, electrochemical performance of polarization curves and AC impedances were analyzed and tested . The results show that the interface of the Ti / TiN / Zr / ZrN film is clear, the structure is compact and the grain is fine. The thickness of the film is about 2 ~ 3μm. The main phases of the film are TiN and ZrN phases and a small amount of Ti And Zr. The bonding strength of the Ti / TiN / Zr / ZrN multilayers was higher than that of 1Cr17Ni2 substrates, the bond strength was greater than 70 N, and the microhardness (HV_ (0.025) The polarization potential and polarization resistance, lower corrosion current density, more capacitive arc.