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根据热丝化学气相沉积法制备大面积金刚石薄膜工艺中热丝与衬底之间的几何关系，建立了该系统的热传递模型，利用计算机辅助数值解方法，给出了衬底温度与衬底表面的热辐射能量密度随热丝数量、热丝与衬底间距变化的关系．并利用该方法设计了沉积面积为100mm×100mm的金刚石薄膜的最佳热丝几何参数．
According to the geometric relation between the hot wire and the substrate in the preparation of large area diamond thin film by the hot wire chemical vapor deposition method, the heat transfer model of the system is established. By using the computer-aided numerical solution method, the relationship between the substrate temperature and the substrate The surface thermal radiation energy density with the number of hot wire, hot wire and substrate spacing changes in the relationship. The optimal hot wire geometry parameters of the diamond film with a deposition area of 100mm × 100mm were designed by this method.