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描述并建立了仿真超精密加工的三维表面形貌模型。三维表面形貌模型由切削参数、刀具几何形状及刀具与工件的相对运动来表征 ,通过将预测的表面粗糙度轮廓线性映射到网格面元上来生成已加工表面的形貌。实际的加工和测量实验表明 ,仿真的三维表面形貌和由激光干涉形貌仪测量得到的三维形貌具有很好的相似性。该模型可用来确定如刀具切削运动的迹线、表面波度等表面特征。
Describes and establishes a three-dimensional surface topography model for the simulation of ultra-precision machining. The 3D surface topography model is characterized by the cutting parameters, tool geometry, and the relative motion of the tool and the workpiece. The machined surface topography is generated by mapping the predicted surface roughness profiles linearly onto the mesh cells. The actual processing and measurement experiments show that the simulated three-dimensional surface topography and the three-dimensional topography measured by the laser interference topography have good similarity. This model can be used to determine surface features such as tool path motion, surface waviness, and more.