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本文提出了一个由线阵CCD、8031单片机和多面镜构成的可在360°内实现高精度角位移测量的系统,对其构成原理、可达精度及影响精度的因素进行了理论分析。解决了常见CCD位移测量系统中量程和精度成反比的限制,实现了整个圆周上0.01mrad的高精度测量。
This paper presents a system consisting of a linear CCD, an 8031 single-chip microcomputer and a polygon mirror that can realize high-precision angular displacement measurement within 360 °. The theoretical analysis, the principle of composition, the reachable precision and the factors affecting the accuracy are analyzed. Solves the common CCD displacement measurement system is inversely proportional to the range and accuracy of the limit to achieve the entire circumference 0.01mrad high-precision measurements.