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针对多种对电磁脉冲敏感的微电子器件进行静电放电、方波电磁脉冲注入试验,通过器件的参数变化情况分析各种器件的电磁脉冲损伤机理,并对试验中的各种试验现象进行相应的解释,最后对多种敏感器件进行抗电磁脉冲防护基础研究,针对部分器件突出具体的防护措施,为微电子器件可靠性的提高提供参考意见。
For a variety of electromagnetic pulse-sensitive microelectronic devices for electrostatic discharge, square wave electromagnetic pulse injection test, through the device parameters change analysis of various devices electromagnetic pulse damage mechanism, and the test of various test phenomena corresponding Explain and finally conduct a basic research on anti-electromagnetic pulse protection for a variety of sensitive devices. In view of the specific protection measures highlighted by some devices, it provides reference for the improvement of the reliability of microelectronic devices.