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采用镍过渡层研究了铜基片上金刚石薄膜的化学气相沉积.镍过渡层与铜基底间在高温退火条件下形成的铜镍共晶体明显地增强了金刚石薄膜与铜基片之间的结合力.用扫描电子显微镜和激光Raman谱研究了薄膜的形貌和质量;采用高温氢等离子体退火工艺在基片表面形成的铜镍碳氢共晶体上抑制了无定形碳和石墨的形成,有利于金刚石薄膜的生长.金刚石薄膜的均匀性受到共晶体的均匀性的影响.
The chemical vapor deposition of diamond films on a copper substrate was investigated using a nickel transition layer. The copper-nickel eutectic formed between the nickel transition layer and the copper substrate at high temperature annealing significantly enhances the bonding between the diamond film and the copper substrate. The morphology and quality of the films were investigated by scanning electron microscopy (SEM) and laser Raman spectroscopy. The formation of amorphous carbon and graphite on copper-nickel bicarbonate eutectic formed on the substrate surface by high-temperature hydrogen plasma annealing was beneficial to the formation of diamond Film growth. The uniformity of the diamond film is affected by the uniformity of the eutectic.