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选取质量差异很大的C ,W和C +W对钢进行离子注入 ,用TEM对注入样品横截面进行结构分析 .结果表明 :注入层结构发生了明显的变化 ,形成了纳米相镶嵌复合层 ,W注入复合层的厚度大约是相应离子射程的 16 .3倍 .C +W注入改性层是由注入层、过渡层和缺陷层构成的 ,其厚度为 6 94nm ,该厚度是离子射程的 2 5.1倍 .3种条件下注入 ,其结构变化有明显的差异 .用TRIM95程序对 3种离子注入的碰撞参数进行了计算 ,结果表明其结构的变化明显地与注入参数相关 .还分析了纳米相镶嵌复合层结构的形成机理 .
The C, W and C + W samples with different masses were selected for ion implantation, the structure of the cross-section was analyzed by TEM.The results showed that the structure of the implanted layer changed obviously, the nano-phase inlaid composite layer was formed, W injection composite layer thickness is about 16.3 times the corresponding ion range .C + W injection modified layer is formed by the injection layer, the transition layer and the defect layer, the thickness of 694nm, the thickness of the ion range of 2 5.1 times .Three kinds of conditions of injection, the structure of the obvious differences between the use of TRIM95 program for three kinds of ions implanted collision parameters were calculated, the results show that the structural changes were significantly related to the injection parameters also analyzed the nano-phase Inlaid composite layer structure formation mechanism.