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1 Introduction Since the early of 1980’s,the studies of soft X-ray and EUV optics have been implemented in CIOMP (Changchun Institute of Optics,Fine Mechanics and Physics)．So far,the research system of soft X-ray and EUV optics has been founded including sources,ra- diometry,testing and manufacturing of the super smooth mirror and multilayer coating mirror fabrication．Based on the above technologies,we started to develop the soft X-ray and EUV optical system such as a space EUV solar telescope and a EUV imager．
1 Introduction Since the early of 1980’s, the studies of soft X-ray and EUV optics have been implemented in CIOMP (Changchun Institute of Optics, Fine Mechanics and Physics). So far, the research system of soft X-ray and EUV optics has been sources including rapids, testing and manufacturing of the super smooth mirror and multilayer coating mirror fabrication. Based on the above technologies, we started to develop the soft X-ray and EUV optical system such as a space EUV solar telescope and a EUV imager.